Citation

Zubarev EM, Mel'nyk VP, Kondratenko VV, Pen'kov OV, Ponomarenko OG, Roma-Nyuk BM, Sevryukova VA. Metallofizika i Noveishie Tekhnologii 2007; 29(12): 1555-1570.

Copyright

(Copyright © 2007)

DOI

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PMID

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Abstract

The initial stages of ion-beam mixing and phase formation in Mo/Si multilayers irradiated by argon ions with the energy of 175 keV are studied by methods of small-angle X-ray diffractometry and cross-section electron microscopy. As revealed, the irradiation leads to both the increase of an interlayer suicide-phase thickness and the decrease of a multilayer period. On both interface boundaries, decrease of the multilayer period and increase of the interlayer silicide-phase thickness depend linearly on the irradiation doze. Average chemical composition of the interlayer silicide phase corresponds to the Si-to-Mo atomic ratio of 4:1. Mentioned salient features of the ion-beam mixing at the initial stages are interpreted according to conception of mixing in subcascades of atomic collisions.

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