Citation

Chow FL, Pey KL, Lee PS, Tung CH, Wang XC, Lim GC, Chong YF. Electrochemical and Solid-State Letters 2004; 7(10): G213-G215.

Copyright

(Copyright © 2004)

DOI

10.1149/1.1788612

PMID

unavailable

Abstract

A bilayered CoTi suicide structure consisting of an amorphous CoTi suicide and a highly textured CoTi silicide was found after pulsed excimer laser annealing of titanium/cobalt/silicon stack at high fluence of 0.6 J/cm 2. The highly textured CoTi suicide is monocrystalline and fully coherent with the Si(111) plane of the substrate but has a large amount of microstructural defects. The constitutional supercooling phenomenon is the solidification mechanism responsible for the highly textured CoTi silicide. The incomplete crystallization shown by the presence of the amorphous CoTi silicide is attributed to a high concentration of titanium impurity. © 2004 The Electrochemical Society. All rights reserved.

Language: en

Keywords

Diffusion; Crystal defects; Silica; Transmission electron microscopy; Microstructure; Rapid thermal annealing; X ray diffraction analysis; Raman scattering; Solidification; Crystallization; Annealing temperature; Constitutional supercooling (CSC); Elemental mapping; Laser pulses; Laser thermal processing; Supercooling