Article Title,Year,Volume,Issue,Page Range,Author
Thermal instability and silicidation of ultrathin HfO x on Si(001),2004,44,6,1590-1593,Lee
Improvement of electrical properties in Sub-0.1 μm MOSFETS with a novel shallow trench isolation structure,2003,43,1,102-104,Eom
Characteristics of HfN films deposited by using remote plasma-enhanced atomic layer deposition,2010,56,3,905-910,Jeon