@article{ref1,
title="Structure of an Er suicide film on a Si(111) substrate using three-dimensional medium-energy ion scattering",
journal="Journal of applied physics",
year="2004",
author="Shimoda, S. and Kobayashi, T.",
volume="96",
number="6",
pages="3550-3552",
abstract="A three-dimensional medium-energy ion scattering (3D-MEIS) spectrometer was used to analyze the crystallographic structure of an Er silicide film on a Si(111) substrate. The three-dimensional detector used was a positive-sensitive and time-resolving microchannel plate detector with two delay-line anodes intersecting at right angles. The blocking pattern from the ErSi2 structure was observed in the &quot;011̄2&quot;, &quot;022̄3&quot; and &quot;011̄1&quot; directions of the film. The results reveal the effectiveness of this 3D-MEIS spectrometer for crystallographic structural analysis of materials.<p /><p>Language: en</p>",
language="en",
issn="0021-8979",
doi="10.1063/1.1778820",
url="http://dx.doi.org/10.1063/1.1778820"
}